摘要
当今,国内半导体芯片领域的竞争很大程度上取决于半导体装备以及核心零部件的竞争。设备的抗干扰能力以及稳定性等特性是衡量设备优劣的重要标准。对于射频电源而言,控制回路的精准、稳定以及快速响应是决定射频电源这款产品性能好坏的重要指标。因此,本文基于电容分压采样、电流互感器采样以及运放电路等相关原理,设计了一款纯硬件电路的功率信号检测回路,并用仿真软件Multisim进行模拟仿真实验,得到输出电压在数值上等于输出功率的实验结果。同时,通过改变母线信号的输入功率,得到输出电压和输入功率具有极高的线性相关性,因此该检测回路具有很好的稳定性,能够适用于大量程下的射频电源功率检测。
Nowadays,the competition in the field of domestic semiconductors largely depends on the competition of semiconductor equipment and core components.The anti-interference ability and stability of the equipment are important criteria for judging the quality of equipment.For the RF power equipment,the accuracy,stability and fast response of the control loop are important indicators that determine the performance of this product.Therefore,this paper designs a pure hardware circuit power signal detection loop based on the related principles of capacitor voltage sampling,current transformer sampling and op-amp circuit,and uses the simulation software Multisim to perform simulation experiments,and the output voltage is numerically equal to experimental results of output power.At the same time,by changing the input power of the bus signal,it is obtained that the output voltage and the input power have a very high linear correlation,so the detection loop has good stability and can be applied to the detection of radio frequency power in a large range.
作者
姚龙
马聪伟
侯丽丽
YAO Long;MA Congwei;HOU Lili(Jihua Laboratory,Foshan 528000,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2023年第4期326-330,共5页
Chinese Journal of Vacuum Science and Technology
基金
季华实验室青年基金项目(X220291XA220)。
关键词
线性相关
前向功率
乘法器
运放
Linear correlation
Forward power
Multiplier
Operational amplifier
