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高斯光束整形为平顶光束的非球面镜系统设计与优化

Design and optimization of aspheric mirror system converting gaussian beam to flattop beam
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摘要 本文利用费米-狄拉克函数建立了平面顶部的光束模型,并对其进行了理论推导。然后,利用光学仿真软件建立高斯光束整型系统模型,利用光场的物理光学传播规律追踪光学系统,得出了光束的强度分布及特征,并分析仿真结果,该结果可为高斯光束整形为平顶光束的非球面镜系统奠定理论基础。 In this paper, the beam model at the top of the plane is established by using the Fermi-Dirac function, and its theoretical derivation is carried out. Then, the Gaussian beam shaping system model is established by optical simulation software. Simultaneously, the optical system is tracked by the physical optical propagation law of the light field. And, the intensity distribution and characteristics of the beam are obtained, which lays a theoretical foundation for the asphaltic mirror system with Gaussian beam shaping as flat top beam.
作者 舒存铭 唐泽斌 谢玉林 SHU Cun-ming;TANG Ze-bin;XIE Yu-lin(0ffice of Information Construction,FEduraion Technology Sarvie Center,Huanggang Normal Uriversity,Huanggang 43800,Hubei,China;School of Physics and Electronic Information,Huanggang Normal University,Huanggang 438000,Hubei,China)
出处 《黄冈师范学院学报》 2023年第3期54-57,共4页 Journal of Huanggang Normal University
基金 湖北省教育厅科研项目(B2021239) 教育部协同育人项目(202101346013、202102575012) 黄冈师范学院高级别培育项目(202108404)。
关键词 高斯光束 非球面镜 整形系统 光学设计 平顶光束 Gaussian beam aspheric mirror shaping system optical design flattop beam
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  • 1印建平,刘南春,夏勇,恽旻.空心光束的产生及其在现代光学中的应用[J].物理学进展,2004,24(3):336-380. 被引量:61
  • 2郭立萍,黄惠杰,王向朝.光学光刻中的离轴照明技术[J].激光杂志,2005,26(1):23-25. 被引量:22
  • 3陈四海,潘峰,付小朝,柯才军,汪殿民,向思桦,赖建军,易新建.基于MoEMS工艺制作柔性光学传感器[J].半导体光电,2005,26(B03):64-66. 被引量:1
  • 4V. Kettunen, O. Ripo|l, H. P. Herzig. Beam shaping in deep UV: comparison of methods[J].Diffractive Optics, 2001, 30:80-81.
  • 5C. Kopp, L. Ravel, P. Meyrueis. Efficient beam shaper homogenizer design combining diffractive optical elements, mierolens array and random phase plate[J].J. Opt. A: Pure Appl. Opt. , 1999, 1:398-403.
  • 6V. Kettunen, Heptagon, Zurich. Applications of Diffractive and Micro-Optics in lithography[M]. Waltham: Academic Press. Encyclopedia of Morden Optics (Diffractive systems), 2004. 281-290.
  • 7Jerry Leonard, James Carriere, Jared Stack et al.. An improved process for manufacturing diffractive optical elements for off-axis illumination systems[C]. SPIE, 2001, 6924:692420.
  • 8Marc D. Himel, Robert E. Hutchins, Jamey C. Colvin et al.. Design and fabrication of customized illumination patterns for low kl lithography: a diffractive approach[C]. SPIE, 2001, 4346 : 1436- 1442.
  • 9Yuri V. Miklyaev, Waleri Imgrunt, V. S. Pavelyev et al.. Novel continuously shaped diffractive optical elements enable high efficiency beam shaping[C]. SPIE, 2010, 7640: 764024.
  • 10Fred M. Dickey, Louis S. Weichman, Richard N. Shagam. Laser beam shaping techniques [C]. SPIE, 2000, 4065:3384348.

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