摘要
对多晶硅工艺副产物四氯化硅进行回收,并结合下游制备氮化硅粉体的利用路线,研究可行、高效的回收精制工艺。分别针对还原尾气、四氯化硅废液的组成特点设计四氯化硅回收工艺,并通过四氯化硅精制工艺将四氯化硅产品与其他氯硅烷进行分离,使其满足氨解法制氮化硅对原料的要求。使用Aspen Plus对上述工艺进行建模分析,并通过工艺能量集成进一步降低工艺整体能耗,使该利用路线更具备竞争力。
Silicon tetrachloride,a by-product of the polysilicon process was recovered,and combined with the downstream utilization route for preparing silicon nitride powder,feasible and efficient recovery and refining process was researched.According to the composition characteristics of reduction tail gas and silicon tetrachloride waste liquid,the silicon tetrachloride recovery process was designed,and the silicon tetrachloride product was separated from other chlorosilanes,so that it can satisfy the requirements of the raw material for the production of silicon nitride by ammonolysis.Aspen Plus was used to model and analyze the above process,and the overall energy consumption of the process was further reduced through process energy integration,making this utilization route more competitive.
作者
王克峰
杨平
李娇
WANG Ke-feng;YANG ping;LI jiao(Dalian University of Technology,Dalian University of Technology,Dalian Liaoning 116024,China;Stadium,Dalian University of Technology,Dalian Liaoning 116024,China)
出处
《当代化工》
CAS
2023年第5期1125-1128,1136,共5页
Contemporary Chemical Industry
基金
国家863项目,高可靠工业在线色谱仪工程化及应用开发(项目编号:2017YFF-106106)。
