摘要
半导体器件电学法热阻测试过程中,电流切换带来的误差是影响测试准确性的重要原因,且该误差目前尚无有效方法评估。在对误差原理分析基础上,设计了“双芯片”测试回路结构避免电流切换,得到不含切换误差的结温参考量值,实现了对仪器测试结果的有效评估。结果显示,该方法能够对热阻测试仪切换过程误差进行定量评估,在热阻测试仪计量方面具有较好的实际意义。
During the semiconductor device electrical method thermal resistance testing process,the error caused by current switching is an important factor affecting the accuracy of measurement,which could not be evaluated effectively now.On the basis of error principle analysis,a double-chip circuit was designed to avoid current switching,and a junction temperature reference value without switching error was obtained,achieving effective evaluation of instrument testing results.The results show that this method can quantitatively evaluate the switching process error of thermal resistance testers,and has good practical significance in measuring thermal resistance testers.
作者
李灏
刘岩
翟玉卫
丁晨
丁立强
吴爱华
LI Hao;LIU Yan;ZHAI Yu-wei;DING Chen;DING Li-qiang;WU Ai-hua(The 13th Research Institute,CETC,Shijiazhuang,Hebei 050051,China)
出处
《计量学报》
CSCD
北大核心
2023年第7期1059-1063,共5页
Acta Metrologica Sinica
关键词
计量学
结温测试
电流切换
双芯片回路
metrology
junction temperature test
current switching
double-chip circuit
