摘要
针对高低温环境对高g值加速度传感器灵敏度影响机理不清的问题,通过建立两端固支的敏感单元数学模型,得到了传感器灵敏度与敏感单元纵向应力、横向应力的关系。通过热-力耦合仿真分析得到了传感器灵敏度与温度间的关系,在-40℃~50℃范围内,传感器灵敏度随温度的增加而减小,且在-40℃~20℃范围内灵敏度变化较快,在20℃~50℃范围内灵敏度变化较慢。通过传感器高低温试验得到高低温环境下传感器灵敏度数据,-40℃条件下灵敏度大小为0.523μV/g;50℃条件下灵敏度大小为0.516μV/g。与仿真结果进行对比,验证了温度变化对传感器灵敏度的影响规律,为提升高g值加速度传感器在高低温环境下测量精度具有理论参考意义。
Aiming at the unclear mechanism of the effect of high and low temperature environment on the sensitivity of high-g accelerometer,a mathematical model of the sensitive unit with a solid support at both ends is proposed.The relationship among the sensor sensitivity,longitudinal stress,and transverse stress of the sensitive unit is determined.The relationship between sensor sensitivity and temperature is obtained by thermal-force coupling simulation analysis.In the range of-40℃~50℃,the sensor sensitivity decreases with the increase of temperature,and the sensitivity changes fast in the range of-40℃~20℃.It is slow in the range of 20℃~50℃.The sensor sensitivity data under high and low temperature environment are collected by the sensor high and low temperature test.The magnitude of sensitivity at-40℃is 0.523μV/g,the magnitude of sensitivity at 50℃is 0.516μV/g.The experiment results are compared with the simulation results to evaluate the effectiveness of temperature change on the sensor sensitivity law.For improving the measurement accuracy of high-g accelerometer under high and low temperature environment,it has theoretical reference significance.
作者
乔诗翔
李豪杰
于航
陈志鹏
Qiao Shixiang;Li Haojie;Yu Hang;Chen Zhipeng(ZNDY of Ministerial Key Laboratory,Nanjing University of Science and Technology,Nanjing 210094,China)
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2023年第5期240-248,共9页
Chinese Journal of Scientific Instrument
关键词
高g值加速度传感器
压阻式
高低温
灵敏度
high-g accelerometer
piezoresistive accelerometer
high and low temperature
sensitivity
