摘要
利用等离子体增强原子层沉积技术(PE-ALD)在涂覆聚丙烯酸酯多元醇树脂有机涂膜的PET基底上沉积一层无机薄膜得到功能性PET复合膜。通过水蒸气透过率测试仪和紫外可见近红外分光光度计研究了有机涂膜厚度、PE-ALD镀膜种类和PE-ALD镀膜温度对PET复合膜水蒸气阻隔性和透光性能的影响。结果表明:聚丙烯酸酯多元醇有机涂膜厚度对PET复合膜的水汽阻隔性和透光率基本无影响;PE-ALD沉积的Al2O3薄膜可大幅提高PET复合膜的水蒸气阻隔性,且PE-ALD镀膜温度为100℃时,水蒸气阻隔性能最优,可达0.17g·m^(-2)·d^(-1)。
A layer of organic film was coated on the PET substrate with polyacrylate polyol resin,and an inorganic film was deposited on the organic coating by plasma enhanced atomic layer deposition(PE-ALD)to obtain functional PET composite film.The effects of organic coating thickness,PE-ALD coating type and PE-ALD coating temperature on the water vapor barrier property and light transmission property of PET composite films were investigated by water vapor transmittance tester and ultraviolet-visible-near-infrared spectrophotometer.The results show that the thickness of polyacrylate polyol organic coating film has little effect on the water vapor barrier property and light transmittance of the PET composite film.The Al2O3 film deposited by PE-ALD can greatly improve the water vapor barrier property of the PET composite film,and the water vapor barrier property is the best when the PE-ALD coating temperature is 100℃,reaching 0.17g·m^(-2)·d^(-1).
作者
任冬雪
孙小杰
陈兰兰
REN Dong-xue;SUN Xiao-jie;CHEN Lan-lan(National Institute of Clean-and-Low-Carbon Energy,Beijing 102209,China)
出处
《真空》
CAS
2023年第4期18-23,共6页
Vacuum
基金
国家重点研发计划(2018YFB1500200)。
