摘要
无驱动结构MEMS陀螺的结构简单、自身没有驱动结构,依靠载体自旋为其提供驱动力。该类MEMS陀螺在工作过程中易受自旋频率影响,使输出信号与输入角速度之间产生非线性误差。针对自旋频率影响陀螺输出信号的问题,文中提出一种非线性补偿方法。通过软件程序与硬件电路相结合,对陀螺在不同自旋频率与输入角速度下的输出信号进行分析,并对输出信号进行非线性补偿,以此来实现陀螺的自旋频率补偿。通过将补偿前后的输出信号进行对比,得出所提方法可以有效地消除陀螺输出信号与输入角速度之间存在的非线性误差。实验结果表明,补偿后的陀螺输出信号准确性提高97.0%,稳定性提高90.8%,在一定程度上可以消除自旋频率对陀螺输出信号的影响,提高陀螺性能。
The MEMS(micro⁃electro⁃mechanical system)gyroscope without driving mechanism has simple structure and has no driving mechanism itself,but depends on the carrier self⁃spinning to provide driving force.This type of MEMS gyroscope is easily affected by the self⁃spin frequency in its working process,which causes the nonlinear error between the output signal and the input angular velocity.In allusion to the problem that the self⁃spin frequency affects the output signal of the gyroscope,a method of the nonlinear compensation is proposed.In combination with software program and hardware circuit,the output signal of the gyroscope at different self⁃spin frequencies and different input angular velocities are analyzed and the nonlinear compensation of the output signal is conducted,so that the self⁃spin frequency compensation of the gyroscope can be achieved.By comparing the output signals before and after compensation,it can be verified that the method can effectively eliminate the nonlinear error between the output signal of the gyroscope and the input angular velocity.The experimental results show that the accuracy and the stability of the gyroscope's output signal after compensation are increased by 97.0%and 90.8%,respectively.This method can eliminate the influence of the self⁃spin frequency on the output signal of the gyroscope to a certain extent and improve the gyroscope's performance.
作者
张岂鸣
张伟
刘奎
ZHANG Qiming;ZHANG Wei;LIU Kui(Key Laboratory of Sensor,Beijing Information and Technology University,Beijing 100101,China;Xi’an Institute of Modern Control Technology,Xi’an 710065,China)
出处
《现代电子技术》
2023年第23期155-159,共5页
Modern Electronics Technique
基金
北京市教育委员会科技计划重点项目:基于微机械摆的旋转飞行器姿态稳定敏感技术研究(KZ201711232030)
北京市传感器重点实验室开放课题基金资助项目(2022CGKF002)。
关键词
无驱动结构
MEMS陀螺
自旋频率补偿
输出信号
输入角速度
非线性误差
非线性补偿
non⁃driven structure
MEMS gyroscope
self⁃spin frequency compensation
output signal
input angular velocity
nonlinear error
nonlinear compensation
