摘要
TiN薄膜具有优异的综合性能而受到广泛应用和研究。综述了TiN薄膜的多种制备技术,介绍了制备技术和工艺参数对TiN薄膜结构和性能影响,阐述了TiN薄膜应用领域,最后展望了TiN薄膜未来发展方向。
TiN films are widely used and studied due to their excellent comprehensive properties.Various preparation techniques of TiN thin films are reviewed.The effects of preparation techniques and process parameters on the structure and properties of TiN thin films are introduced.The application fields of TiN thin films are described.Finally,the future development direction of TiN thin films is prospected.
作者
杨海
陆昆
Yang Hai;Lu Kun(Medical College,Chuzhou City Vocational College,Chuzhou 239000,China)
出处
《山东化工》
CAS
2023年第18期109-111,共3页
Shandong Chemical Industry
基金
安徽省自然科学重点项目(KJ2020A1004)。
关键词
TIN薄膜
制备
性能
应用
TiN film
preparation
properties
application
