摘要
二维材料如石墨烯、六方氮化硼、过渡金属硫化物和黑磷,因其优异特性在科研和工业领域备受关注,在传感、催化、储能等领域具有巨大应用潜力.超快激光加工技术以其高精度和广泛的材料适应性,在二维材料的加工和器件制备中扮演着关键角色,实现了材料的无损或低损加工,在石墨烯的制备、还原氧化石墨烯、烧蚀和图案化转移等方面表现出优势.对于过渡金属硫化物和其它二维材料,超快激光同样能有效实现相变、剥离、减薄和表面沉积.超快激光与二维材料的相互作用为微纳电子学、光电子学等高科技领域的应用提供了新机遇,未来研究将聚焦于成本降低、量子器件性能提升和高性能微纳器件的开发.
Two-dimensional materials such as graphene,hexagonal boron nitride,transition metal dichalcogenides,and black phosphorus have attracted significant attention in the fields of science and industry due to their exceptional properties.These materials demonstrate great potential in applications like sensing,catalysis,and energy storage.Ultrafast laser processing technology,known for its high precision and wide material adaptability,plays a crucial role in the processing and device fabrication of two-dimensional materials,achieving non-destructive or low-damage processing.This technique demonstrates advantages in the reduction of graphene oxide,preparation,ablation,and patterned transfer of graphene.For transition metal dichalcogenides and other two-dimensional materials,ultrafast laser can also effectively induce phase transitions,exfoliation,thinning,and surface deposition.The interaction between ultrafast lasers and two-dimensional materials opens new opportunities in high-tech fields such as micronanoelectronics and optoelectronics,with future research focusing on reducing costs,improving the performance of quantum devices,and developing high-performance micronano devices.
作者
郭灵岚
张弘昊
张鑫泉
朱利民
沈道智
GUO Linglan;ZHANG Honghao;ZHANG Xinquan;ZHU Limin;SHEN Daozhi(Shanghai Jiao Tong University,Shanghai,200240,China)
出处
《焊接学报》
EI
CAS
CSCD
北大核心
2023年第12期97-105,I0009,共10页
Transactions of The China Welding Institution
基金
国家自然科学基金青年项目(52305388)
上海市浦江人才计划项目(GJ0200057)
中船-交大前瞻基金项目(ZCJDQZ202302B03)
上海交通大学双一流建设项目(WH220402021)。
关键词
超快激光
二维材料
微纳加工
加工工艺
纳米材料
ultrafast laser
two-dimensional materials
micro-nano processing
processing technology
nanomaterials
