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Controllable growth of wafer-scale PdS and PdS_(2) nanofilms via chemical vapor deposition combined with an electron beam evaporation technique

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摘要 Palladium(Pd)-based sulfides have triggered extensive interest due to their unique properties and potential applications in the fields of electronics and optoelectronics.However,the synthesis of large-scale uniform PdS and PdS_(2)nanofilms(NFs)remains an enormous challenge.In this work,2-inch wafer-scale PdS and PdS_(2) NFs with excellent stability can be controllably prepared via chemical vapor deposition combined with electron beam evaporation technique.The thickness of the pre-deposited Pd film and the sulfurization temperature are critical for the precise synthesis of PdS and PdS_(2) NFs.A corresponding growth mechanism has been proposed based on our experimental results and Gibbs free energy calculations.The electrical transport properties of PdS and PdS_(2) NFs were explored by conductive atomic force microscopy.Our findings have achieved the controllable growth of PdS and PdS_(2) NFs,which may provide a pathway to facilitate PdS and PdS_(2) based applications for next-generation high performance optoelectronic devices.
出处 《Journal of Semiconductors》 EI CAS CSCD 2023年第12期64-71,共8页 半导体学报(英文版)
基金 supported by National Natural Science Foundation of China (No.11974301) Key Research and Development Program of Hunan Province (No.2022GK2007) Key Project from Department Education of Hunan Province (No.22A0123) Scientific Research Fund of Hunan Provincial Education Department (No.21B0136) National college students innovation and entrepreneurship training program (No.S202310530016)。
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