摘要
磁悬浮分子泵具有工作转速高、转子极转动惯量大等特点,针对磁悬浮分子泵转子在升速过程中出现的弯曲模态振动以及涡动模态振动,提出了一种基于滤波交叉反馈与陷波器的大转动惯量磁悬浮转子控制方法。建立磁悬浮轴承-大转动惯量刚性转子系统数学模型,求解得出转子涡动模态频率,根据该模型分析了滤波交叉反馈控制器对涡动模态振动的抑制效果,并且设计了陷波器用于抑制不同转速下的转子弯曲模态振动。试验结果表明,磁悬浮分子泵稳定升速至工作转速18000 r/min,转子振动位移为35μm,弯曲模态振动以及涡动模态振动得到了有效抑制。
A magnetic levitation molecular pump has characteristics of high operating rotating speed and large rotor polar moment of inertia.Here,aiming at bending modal vibrations and whirl modal vibrations occurring in acceleration process of magnetic levitation molecular pump rotor,a control method for magnetic levitation rotor with a large moment of inertia based on filtered cross feedback and notch filter was proposed.The dynamic model of a magnetic levitation bearing-large moment of inertia rigid rotor system was established to solve rotor whirl modal frequencies.With this model,the suppression effect of filtered cross feedback controller on whirl modal vibrations was analyzed,and a notch filter was designed to suppress rotor bending modal vibrations under different rotating speeds.The experimental results showed that when magnetic levitation molecular pump steadily increases its rotating speed to 18000 r/min,its rotor vibration displacement is 35μm,its rotor bending modal vibration and whirl modal vibration are effectively suppressed.
作者
姚润晖
周瑾
丁嵩
张越
徐园平
YAO Runhui;ZHOU Jin;DING Song;ZHANG Yue;XU Yuanping(College of Mechanical&Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China)
出处
《振动与冲击》
EI
CSCD
北大核心
2024年第1期116-122,共7页
Journal of Vibration and Shock
基金
国家自然科学基金(52075239)。
关键词
磁悬浮分子泵
交叉反馈控制
陷波滤波器
振动抑制
magnetic levitation molecular pump
cross feedback control
notch filter
vibration suppression
