摘要
二氧化氮(NO_(2))是最常见的空气污染物之一,主要来源于化石燃料的燃烧,需要研制性能优良的NO_(2)气体传感器来对其体积分数进行实时监测。采用氧化钇稳定的氧化锆(YSZ)为固体电解质、ZnO/CuO为敏感电极,制备了阻抗型NO_(2)传感器。采用分步浸渍法将敏感材料原位引入到YSZ多孔骨架中,通过调整敏感材料ZnO/CuO摩尔比来优化传感器的敏感性能。用X射线衍射仪(XRD)和扫描电子显微镜(SEM)对样品的组成和微观结构进行了表征。结果表明,ZnO/CuO颗粒均匀分散在YSZ多孔层中。以相角(Θ)作为响应信号来评价传感器敏感性能。实验结果表明,与单一氧化物ZnO相比,ZnO和CuO摩尔比为8∶2制备的传感器对NO_(2)气体具有更好的敏感性能。在400~500℃,Θ响应值与5×10^(-5)~5×10^(-4)NO_(2)体积分数呈良好的线性关系。450℃时,传感器有最低检测下限5×10^(-5)。此外,该传感器表现出最大响应值(5×10^(-4)NO_(2)的Θ响应值为18°)、最佳灵敏度(0.039°/10^(-6))、良好的稳定性以及对其他气体的抗干扰能力。
Nitrogen dioxide(NO_(2))is one of the most common air pollutants and mainly comes from the combustion of fossil fuels.It is necessary to develop a NO_(2)gas sensor with excellent performance to monitor its volume fraction in real time.An impedance type NO_(2)sensor was prepared by using yttria stabilized zirconia(YSZ)as solid electrolyte and ZnO/CuO as sensitive electrode.The sensitive materials were introduced into the porous skeleton of YSZ in situ by step-by-step impregnation method,and the sensitive performance of the sensor was optimized by adjusting the molar ratio of sensitive material ZnO/CuO.The composition and microstructure of the samples were characterized by X-ray diffractometer(XRD)and scanning electron microscope(SEM).The results show that ZnO/CuO particles are uniformly dispersed in the porous layer of YSZ.The phase angle(Θ)was used as the response signal to evaluate sensitive performance of sensor.The experimental results show that compared with the single oxide ZnO,the sensor prepared with ZnO and CuO molar ratio of 8∶2 has better sensitive performance to NO_(2)gas.At 400-500℃,Θresponse values show good linear relationships with NO_(2)volume fractions of 5×10^(-5)-5×10^(-4).At 450℃,the sensor has a minimum detection limit of 5×10^(-5).In addition,the sensor exhibits the maximum response value(Θresponse value of 5×10^(-4)NO_(2)is 18°),the best sensitivity(0.039°/10^(-6)),good stability and anti-interference ability to other gases.
作者
赵晓晶
王岭
孟维薇
李跃华
戴磊
Zhao Xiaojing;Wang Ling;Meng Weiwei;Li Yuehua;Dai Lei(College of Chemical Engineering,North China University of Science and Technology,Tangshan 063210,China;Key Laboratory of Environmental Photocatalysis Materials of Hebei Province,North China University of Science and Technology,Tangshan 063210,China)
出处
《微纳电子技术》
CAS
2024年第2期120-127,共8页
Micronanoelectronic Technology
基金
国家自然科学基金(62241104)
河北省自然科学基金(B2022209018)
河北省省属高等学校基本科研业务费研究项目(JQN2022012)
唐山市科技计划项目(21130214C,22130215G)
唐山市人才资助计划(A202202006)。
