摘要
为了延长树脂基器件耐磨层的寿命,研制了Ti-DLC-MoS_(2)复合膜层,以磁控溅射的方式对树脂基材料依次镀膜,并考察了不同镀膜工艺的效果。结果表明:与表面镀Ti-DLC混合膜层相比,Ti-DLC-MoS_(2)复合膜层的耐磨性提高了30%;与无膜层的树脂材料相比,Ti-DLC-MoS_(2)复合膜层的耐磨性提高了54%。腔内压力3.00 Pa,功率密度0.30 W/cm^(2)镀Ti膜;腔内压力0.65 Pa,功率密度4.00 W/cm^(2)镀DLC膜;腔内压力3.00 Pa,功率密度7.00 W/cm^(2)镀MoS_(2)膜的工艺条件下,复合膜层的摩擦系数最低,为0.0776。Ti-DLC-MoS_(2)复合膜层显著提高了树脂基器件的耐磨性能,能大幅延长树脂基器件的使用寿命。
In order to extend the service life of the wear resistant layer of resin-based devices,a Ti-DLC-MoS_(2)composite film layer was devel-oped.The resin-based materials were sequentially coated by magnetron sputtering,and the effects of different coating processes were investiga-ted.Results showed that the wear resistance of the Ti-DLC-MoS_(2)composite film was improved by 30%compared to that of the Ti-DLC mixed film.In comparison with the resin material without a film layer,the wear resistance of the Ti-DLC-MoS_(2)composite film layer was enhanced by 54%.The friction coefficient of the composite film was the lowest,which was 0.0776,under specific conditions:a cavity pressure of 3.00 Pa and power density of 0.30 W/cm^(2)for sputtering the Ti coating;a cavity pressure of 0.65 Pa and power density of 4.00 W/cm^(2)for the DLC coat-ing;and a cavity pressure of 3.00 Pa and power density of 7.00 W/cm^(2)for the MoS_(2)coating.The Ti-DLC-MoS_(2)composite film layer significantly enhanced the wear resistance of resin-based devices,resulting in a substantial improvement in their service life.
作者
王云飞
孟银娜
高志廷
WANG Yunfei;MENG Yinna;GAO Zhiting(School of Intelligent Engineering,Henan Mechanical and Electrical Vocational College,Zhengzhou 451191,China;Luoyang Eagle Powerful Science&Technology Co.,Ltd.,Luoyang 457000,China)
出处
《材料保护》
CAS
CSCD
2024年第2期144-147,共4页
Materials Protection
基金
河南省科技计划资助项目(202102210072)。
关键词
树脂
磁控溅射
类金刚石膜
二硫化钼膜
resin
magnetron sputtering
diamond like carbon(DLC)coating
MoS_(2)coating
