摘要
The performance of optical interconnection has improved dramatically in recent years.Silicon-based optoelectronic heterogeneous integration is the key enabler to achieve high performance optical interconnection,which not only provides the optical gain which is absent from native Si substrates and enables complete photonic functionalities on chip,but also improves the system performance through advanced heterogeneous integrated packaging.This paper reviews recent progress of silicon-based optoelectronic heterogeneous integration in high performance optical interconnection.The research status,development trend and application of ultra-low loss optical waveguides,high-speed detectors,high-speed modulators,lasers and 2D,2.5D,3D and monolithic integration are focused on.
作者
李乐良
李贵柯
张钊
刘剑
吴南健
王开友
祁楠
刘力源
Le-Liang Li;Gui-Ke Li;Zhao Zhang;Jian Liu;Nan-Jian Wu;Kai-You Wang;Nan Qi;Li-Yuan Liu(Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Material Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)
基金
Project supported in part by the National Key Research and Development Program of China(Grant No.2021YFB2206504)
the National Natural Science Foundation of China(Grant No.62235017)
the China Postdoctoral Science Foundation(Grant No.2021M703125).
