摘要
通过调整工件偏压和W掺杂靶功率等工艺参数,研究不同工艺对阀杆DLC膜层性能的影响。利用拉曼光谱研究了不同DLC涂层的化学成分和结构,并采用纳米压痕和显微划痕对涂层的力学性能进行了测试。同时,通过摩擦磨损试验评价了复合涂层的摩擦学性能。结果显示,1200V工件偏压下得到的DLC涂层具有更高的硬度和较低的磨损率。W掺杂的DLC涂层附着力更强,但硬度较低,磨损率较高。这项研究为后续制备高硬低摩DLC涂层工艺设计提供参考。
The influence of different processes on the performance of valve stem DLC coatings was investigated by adjusting process parameters such as workpiece bias and W-doped target power.The chemical composition and structure of different DLC coatings were studied using Raman spectroscopy,and the mechanical properties of the coatings were tested using nanoindentation and microscratch techniques.Meanwhile,the tribological properties of the composite coatings were evaluated through friction-wear tests.The results showed that the DLC coating obtained under a workpiece bias of 1200V had higher hardness and lower wear rate.The W-doped DLC coating had stronger adhesion but lower hardness and higher wear rate.This study provides reference for the subsequent design of high hardness and low friction DLC coating processes.
作者
王水勇
赵万祥
王荣山
韩姚磊
许继尧
WANG Shui-yong;ZHAO Wan-xiang;WANG Rong-shan;HAN Yao-lei;XU Ji-yao(Suzhou Nuclear Power Research Institute Co.,Ltd.Suzhou 215004,China)
出处
《全面腐蚀控制》
2024年第2期60-65,103,共7页
Total Corrosion Control
关键词
DLC涂层
硬度
摩擦磨损
表面改性
制备工艺
DLC coating
hardness
friction and wear
surface modification
preparation process
