摘要
在大规模集成电路制程中,六氟丁二烯作为蚀刻剂使用。与传统蚀刻剂相比,六氟丁二烯蚀刻速率更快、选择性和深宽比更高、环境更友好。对六氟丁二烯的合成方法进行归纳和总结,为高纯六氟丁二烯的研发和生产提供参考。
In large-scale integrated circuit manufacturing processes,hexafluorobutadiene is used as an etchant.Compared to traditional etchants,hexafluorobutadiene has faster etching rates,higher selectivity,depth to width ratio,and is more environmentally friendly.This article summarizes the synthesis methods of hexafluorobutadiene,providing reference for the development and production of high-purity hexafluorobutadiene.
作者
姜世楠
吕随强
罗文键
商洪涛
谢晓东
邵野
史紫微
JIANG Shinan;L Suiqiang;LUO Wenjian;SHANG Hongtao;XIE Xiaodong;SHAO Ye;SHI Ziwei(PERIC Special Gases Co.,Ltd.,Handan 057550,China)
出处
《低温与特气》
CAS
2024年第1期1-4,11,共5页
Low Temperature and Specialty Gases
关键词
六氟丁二烯
蚀刻剂
合成
hexafluorobutadiene
etchant
synthesis
