摘要
使用等离子增强磁控溅射技术,利用三甲基硅烷TMS(Si-C)以及六甲基二硅氧烷HMDSO(Si-CO)气体在H13钢表面制备了TiCrSiCN和TiCrSiCON纳米复合涂层。结合SEM、AFM、XRD、EDS等研究了O元素对涂层显微组织、物相组成、表面能、硬度、摩擦因数、耐磨和耐高温氧化性能的影响。结果表明:与无氧的TiCrSiCN涂层相比,含氧的TiCrSiCON涂层表面较粗糙,致密度低,且存在典型的柱状组织,从而导致其较高的表面能;O元素的加入提高了涂层的硬度,使TiCrSiCON涂层的耐磨性能显著提高,但TiCrSiCN和TiCrSiCON的摩擦因数相差不大;TiCrSiCON涂层中的Cr元素易与O元素结合形成一层致密的氧化膜,从而提高了其耐高温氧化性能。
Plasma enhanced magnetron sputtering(PEMS)method was used to deposit TiCrSiCN and TiCrSiCON nanocomposite coatings using trimethylsilane(Si-C)and hexamethyldisiloxane(Si-C-O)precursors on H13 steel.The influences of oxygen on the microstructure,phases,surface energy,hardness,friction coefficient,wear resistance and high-temperature oxidation properties of the coatings were studied by SEM,AFM,XRD,EDS,etc.The results show that the oxygen-containing TiCrSiCON coating shows a rougher surface with a looser microstructure and typical columnar feature,compared with the oxygen-free TiCrSiCN coating.As a result,the surface energy of the oxygen-containing coating is higher than the oxygen-free coating.The addition of oxygen improves the hardness of the nanocomposite coating,thereby significantly enhancing the anti-wear property of the coating.As for the coefficient of friction,there is no obvious difference between TiCrSiCN and TiCrSiCON coatings.The Cr and O in the TiCrSiCON coating could form a dense oxide film which can improve its high-temperature oxidation property.
作者
李灿民
董中林
夏正卫
张心凤
魏荣华
LI Can-min;DONG Zhong-lin;XIA Zheng-wei;ZHANG Xin-feng;WEI Rong-hua(Anhui Chunyuan Coating Technology Co.,Ltd.,Hefei 230001,China;Hefei University of Technology,Hefei 230009,China;Southwest Research Institute,San Antonio 78238,USA)
出处
《真空》
CAS
2024年第2期10-15,共6页
Vacuum
