摘要
为了充分了解大口径主镜镀膜时热应力及自身重力的分布规律,达到控制反射镜面形变化、提高成膜质量的目的,采用有限元分析方法,对大口径主镜反射膜的生长热应力及重力对反射镜面形的影响进行了理论分析和研究。结果表明,大口径主镜反射膜更容易在靠近边缘位置处出现剥落和损坏情况;大口径主镜镀膜过程中,自身重力引起的反射镜面形变化对镀膜质量会产生较大影响,需要进行重力消除处理;3000 mm口径的主镜在采用镜面向上、向下蒸发膜料的方式镀膜时,需要对支撑方式进行优化设计。该研究为大口径反射镜镀膜时控制热应力及重力对反射镜面形的影响提供了参考。
In order to fully understand the distribution law of thermal stress and gravity during the coating of a large aperture primary mirror,to control the shape change of the reflecting mirror,and improve the quality of film forming,the influence of thermal stress and gravity on the shape of reflecting mirror was theoretically analyzed and studied by finite element analysis method.The results show that the reflecting film of the large aperture primary mirror is more prone to spalling and damage near the edge.During the coating process of a large aperture primary mirror,the shape change of the reflecting mirror caused by its own gravity will have a great influence on the coating quality,and gravity elimination treatment is needed.When the main mirror of 3000 mm diameter is coated by evaporation film material up or down,the support mode needs to be optimized.This study provides a reference for controlling the influence of thermal stress and gravity on the shape of the reflecting mirror when coating a large mirror.
作者
何世昆
刘中伟
王磊
高泽运
范红梅
HE Shikun;LIU Zhongwei;WANG Lei;GAO Zeyun;FAN Hongmei(Shandong Huayu Aerospace Technology Company Limited,Yantai 264001,China;Shandong Institute of Space Electronic Technology,Yantai 264001,China)
出处
《激光技术》
CAS
CSCD
北大核心
2024年第2期268-273,共6页
Laser Technology
关键词
薄膜
大口径主镜
热应力
重力
面形优化
thin films
large aperture primary mirror
thermal stress
gravity
shape optimization
