摘要
复杂曲面光学元件应用于光学系统中可以增大系统设计自由度,同时减少系统所需元件数量,有利于实现光学系统的紧凑化、轻量化,被誉为现代光学系统的变革性元件,被广泛应用于空间光学、光刻系统、汽车照明等领域,极大推动了航天、国防及高科技民用事业的发展。然而,复杂曲面光学元件对面形精度要求较高,如何对其面形进行高精度检测从而指导加工成为限制该类元件大范围应用的瓶颈。文章对10余种常用的复杂曲面光学元件面形检测方法进行了分类梳理,按照是否采用干涉原理,将检测方法分为非干涉检测法和干涉检测法两大类,分别介绍了各种检测方法的原理和适用范围,回顾了各方法的发展历程,着重分析了几种典型方法进行面形检测的特点,并对未来复杂曲面光学元件高精度面形检测技术的发展趋势加以展望。
The application of complex curved optical components in these systems enhances design flexibility,reduces the number of components required,and facilitates the miniaturization and lightweighting of optical systems.Celebrated as transformative elements in modern optical systems,these components find extensive applications in space optics,lithography systems,automotive lighting,and more,significantly advancing the development of aerospace,national defense,and high-tech civilian enterprises.However,the high surface shape precision required by complex curved optical components poses a challenge.The ability to conduct high-precision surface shape inspections to guide processing has become a bottleneck limiting the widespread application of such components.This paper categorizes and reviews the commonly used surface shape inspection methods for complex curved optical components.According to whether interference principle is adopted,the measurement methods are divided into two categories:non-interferometry and interferometry.It also looks back at the development of these methods,focusing on the characteristics of several typical methods for surface shape inspection,and anticipates future trends in the development of high-precision surface shape inspection technologies for complex curved optical components.
作者
刘斌
王孝坤
程强
刘忠凯
李凌众
蔡梦雪
张洛嘉
李文涵
王金成
张学军
LIU Bin;WANG Xiaokun;CHENG Qiang;LIU Zhongkai;LI Lingzhong;CAI Mengxue;ZHANG Luojia;LI Wenhan;WANG Jincheng;ZHANG Xuejun(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China;State Key Laboratory of Applied Optics,Changchun 130033,China;Key Laboratory of Optical System Advanced Manufacturing Technology,Chinese Academy of Sciences,Changchun 130033,China)
出处
《南通大学学报（自然科学版）》
CAS
2024年第1期1-27,共27页
Journal of Nantong University(Natural Science Edition)
基金
国家自然科学基金重大科研仪器研制项目(62127901)
国家重点研发计划项目(2022YFB3403400)
中国科学院大学生创新实践训练计划项目(Y9I838S)。
关键词
复杂光学曲面
面形检测
非接触检测
干涉检测
零位检测
非零位检测
complex optical surface
surface measurement
non-contact measurement
interferometry
null testing
non-null testing
