摘要
阐述设计并制备的一种柔性多层等强度梁式传感器,通过力移加载试验对传感器电容变化量与梁自由端力进行测试,传感器对力的灵敏度最高为1.855mN/pF,具有高灵敏度与线性度。
This paper describes the design and preparation of a flexible multi-layer beam type sensor with equal strength.The capacitance change of the sensor and the free end force of the beam are tested through force transfer loading tests.The sensor has the highest sensitivity to force of 1.855mN/pF,with high sensitivity and linearity.
作者
叶智鹏
张晨辉
YE Zhipeng;ZHANG Chenhui(School of Science,Xi'an University of Architecture and Technology,Shaanxi 710055,China.)
出处
《集成电路应用》
2024年第2期402-403,共2页
Application of IC
关键词
柔性传感器
等强度悬臂梁
加载试验
flexible sensors
equal strength cantilever beams
loading tests
