摘要
齿轮齿面形貌激光干涉测量中,由于容易受到多种噪声干扰,采集到的包裹相位图中会存在相位质量差的区域,解包路径经过这些区域会造成解包裹错误,降低测量精度。针对这一问题,根据干涉条纹图像的概率分布特点,本文提出一种基于Tsallis相对熵质量评价的包裹相位修补方法。该方法先利用高斯分布拟合阈值处理后的图像,再由Tsallis相对熵评价相位质量,最后修补质量较差的区域以提高相位解包裹质量。设计对比实验验证本方法的有效性,实验结果表明,该方法可以减少40%的相位残差点,并且有效提高了相位质量。该方法使用简单,准确率高,同样适用于其他移相光学领域。
In the laser interferometric measurement of gear tooth flank topography,the collected wrapped phase map can be influenced by various sources of noise.These areas of poor phase quality in the wrapped phase map can lead to unwrapping errors and reduces measurement accuracy.This paper proposed a wrapped-phase repair method to address the problem.It utilized Tsallis relative entropy as an evaluation criterion,based on the probability distribution characteristics of the interference fringe image.The method first fitted the thresholded image using Gaussian distribution,then evaluated the phase quality by Tsallis relative entropy,finally patched the poor quality regions to improve the quality of phase unwrapped.The experimental results show that the method can reduce the phase residue points by 40%and effectively im⁃prove the phase quality.The proposed method is user-friendly and highly accurate.It can be applied to other fields related to phase-shifting optics.
作者
康乐谦
杨鹏程
吕秋娟
连力平
朱新栋
KANG Leqian;YANG Pengcheng;LÜQiujuan;LIAN Liping;ZHU Xindong(School of Mechanical and Electrical Engineering,Xi'an Polytechnic University,Xi'an 710048,China;Department of Basic,Rocket Force University of Engineering,Xi'an 710025,China;College of Optoelectronic Engineering,Chongqing University,Chongqing 400040,China;Ministry of Education Key Laboratory for Nonequilibrium Synthesis and Modulation of Condensed Matter,School of Physics,Xi'an Jiaotong University,Xi'an 710049,China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2024年第8期1130-1139,共10页
Optics and Precision Engineering
基金
国家自然科学基金青年项目(No.51905412)
陕西省科技厅自然科学基础研究计划-面上项目(No.2022JM-219)。
