摘要
摩擦电纳米发电机(TENG)在自供电可穿戴领域得到了广泛关注,通过材料修饰及制备工艺优化可实现对人体运动姿态的监测。研制了一种可用于人体运动姿态监测的TENG。一方面基于聚二甲基硅氧烷(PDMS)引入高介电性离子液体(IL),制备了IL@PDMS复合膜作为摩擦层,有效提高了摩擦电输出性能;另一方面,基于光刻微电子机械系统(MEMS)工艺及模板转移技术对IL@PDMS复合膜表面进行金字塔微结构修饰,实现摩擦效应的增强。与纯PDMS膜相比,IL的引入可使摩擦电输出电流及输出电压分别提高近4倍和6倍;另外,表面微结构的修饰也使得输出电流及输出电压分别提升近1.5倍和0.7倍。此外,当工作10 000个周期后,摩擦电输出性能仍保持不变。实验表明,当将IL@PDMS-TENG贴附在手指上时,实现了对人体运动姿态的有效监测。该研究为可穿戴人体运动传感器提供了新的技术路径及应用前景。
Triboelectric nanogenerator(TENG)has attracted widespread attention in the field of self-powered wearables,and the monitoring of human motion posture can be realized by the material modification and preparation process optimization.A TENG for monitoring human motion posture was developed.On the one hand,high dielectric ionic liquid(IL)was introduced based on polydimethylsiloxane(PDMS)to prepare IL@PDMS composite film as a friction layer,which effectively improved the frictional electrical output performances.On the other hand,based on photolithography micro-electromechanical system(MEMS)technology and template transfer technology,the surface of the IL@PDMS composite film was modified with pyramid microstructures to enhance the friction effect.Compared with pure PDMS film,the introduction of IL can increase the triboelectric output current and output voltage by nearly 4 times and 6 times respectively,and the modification of surface microstructure further enhances the output current and output voltage by nearly 1.5 times and 0.7 times.In addition,after 10000 cycles of operation,the triboelectric output performances remain unchanged.Experiments show that when the IL@PDMS-TENG is attached to fingers,effective monitoring of human motion posture is achieved.This study provides a new technological path and application prospects for wearable human motion sensors.
作者
宋金沙
张甜
乔冰琴
赵涓宏
穆继亮
Song Jinsha;Zhang Tian;Qiao Bingqin;Zhao Juanhong;Mu Jiliang(School of Big Data,Shanxi Finance&Taxation College,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China;State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)
出处
《微纳电子技术》
CAS
2024年第5期134-140,共7页
Micronanoelectronic Technology
基金
山西省高等学校科技创新项目(2023L532)
中央引导地方科技发展资金项目(YDZJSX2022A062)。
