摘要
针对两轴压电剪切叠堆在高频电压驱动下的二维高频运动的位移测量问题,提出使用(AFM)探针在敲击模式下的加工痕迹测量压电剪切叠堆运动位移的方法,首先制备热塑性聚合物聚甲基丙烯酸甲酯(PMMA)薄膜,随后进行AFM探针敲击加工实验,扫描AMF探针加工轨迹并对其进行后处理,成功得到压电剪切叠堆的二维高频运动位移,实现了以半接触的方式对压电剪切叠堆二维高频复杂运动的准确检测,并依据实验数据对压电剪切叠堆二维运动位移随电压幅值及频率的变化情况进行分析。实验结果表明,在10 Hz~5 kHz的激励信号频率范围内,所提出的方法能准确测量压电剪切叠堆的运动位移。
Aiming at the displacement measurement problem of two-dimensional high-frequency motion of two-axis piezoelectric shear stacks driven by high-frequency voltage,a method for measuring the displacement of piezoelectric shear stacks by using the machining trajectories of atomic force microscope(AFM)probe in tapping mode was proposed.Firstly,the thermoplastic polymer polymethyl methacrylate(PMMA)film was prepared,and then the AFM probe tapping experiment was carried out.By scanning the processing trajectory of the AFM probe and postprocessing it,the two-dimensional high-frequency motion displacement of the piezoelectric shear stack was successfully obtained.Accurate detection of two-dimensional high-frequency complex motion of piezoelectric shear stacks in a semi-contact manner is realized.Based on the experimental data,the variation of the two-dimensional motion displacement of the piezoelectric shear stack with the voltage amplitude and frequency is analyzed.
作者
尹若楠
薛勃
张津铭
吴哲
Yin Ruonan;Xue Bo;Zhang Jinming;Wu Zhe(College of Mechanical and Electrical Engineering,Northeast Forestry University,Harbin 150040,China)
出处
《强激光与粒子束》
CAS
CSCD
北大核心
2024年第8期158-164,共7页
High Power Laser and Particle Beams
基金
国家自然科学基金项目(52105434)
中国博士后科学基金项目(2022M710642)
东北林业大学人才引进计划项目(520/60201487)。
关键词
原子力显微镜
敲击加工
压电剪切叠堆
二维高频运动
atomic force microscope
tapping
piezoelectric shear stack
two-dimensional high-frequency motion
