摘要
微球辅助显微术是一项提升光学显微系统横向分辨力的技术,可与传统干涉技术结合以实现高横向分辨力的三维形貌测量。微球可工作于抬起模式下,进行感兴趣区域的选取与视场扩展。现有研究对微球辅助干涉术中微球工作在抬起模式时的分析仍不充分,影响了微球辅助干涉技术的纵向测量精度。本文对微球的相位传输机制进行了仿真,总结了微球下方相位分布与微球和样品距离之间的关系。同时,搭建了微球-白光干涉联用系统,并通过AFM控制微球的三维位置,对微球抬起模式下的放大倍数与相位分布进行测量,验证了仿真中微球下方相位分布的结果,为微球辅助干涉术中抬起模式提供了理论基础。
Microsphere-assisted microscopy(MAM)is a technique aimed at enhancing the lateral resolution of optical microscopy,enabling high lateral resolution profile measurement when combined with interferometry.MAM can operate in lift mode,facilitating the selection of regions of interest and expanding the field of view.The analysis of the lifting mode of microspheres in microsphere-assisted interferometry is still insufficient,which affects the longitudinal measurement accuracy of microsphere-assisted interferometry.The phase transmission mechanism of the microsphere was simulated in this paper,and the relationship between the phase distribution below the microsphere and the distance between the microsphere and the sample was summarized.A combined system of microsphere-assisted white light interference microscope was constructed,and the magnification factor and phase distribution of the microsphere in lift mode was measured through atomic force microscope atomic force microscope(AFM)control of the microsphere’s position.The experiment validated the simulated results of microsphere phase transmission,providing a theoretical foundation for microsphere-assisted interferometry(MAI)in lift mode.
作者
洪羽剑
付晓锋
胡晓东
HONG Yujian;FU Xiaofeng;HU Xiaodong(State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China)
基金
supported by National Natural Science Foundation of China (No.52275540)。
关键词
微球辅助显微术
微球辅助干涉术
相位传输
抬起模式
光学仿真
microsphere-assisted microscopy(MAM)
microsphere-assisted interferometry(MAI)
phase transmission
lift mode
optical simulation
