摘要
压电致动器具有位移分辨率高、体积小、响应快、驱动负载能力强、可多自由度输出以及不受电磁干扰等优点,被广泛应用在微纳加工、微机电系统封装、生物医学以及航空航天等领域。然而,由于压电致动器自身存在的迟滞、蠕变等非线性特征,使得输出的稳定性以及精确度受到一定的影响,需采取恰当的控制策略解决上述问题。本文首先对压电致动器的非线性特征进行概述;其次,重点回顾了迟滞模型和蠕变模型的发展历程;然后,介绍了压电致动器的控制补偿策略及研究进展;最后对压电致动器控制技术的未来发展方向进行了讨论与展望。
Piezoelectric actuators have the advantages of high displacement resolution,compact size,rapid response,strong load-driving capability,the ability to provide multi-degree of freedom outputs,and immunity to electromagnetic interference etc,which are widely used in micro-nano processing,micro-electromechanical system packaging,bio-medicine,aerospace engineering and other fields.However,the nonlinear characteristics of piezoelectric actuators,such as hysteresis and creep,make affection for the stability and can cause unstable and inaccurate outputs,which requires certain appropriate control strategies to overcome the above problems.In this research,the nonlinear characteristics of piezoelectric actuators are firstly summarized.Secondly,research progress of hysteresis model and creep model is reviewed.Then,the compensation of control strategy and research progress of piezoelectric actuators are introduced.Finally,the trend of piezoelectric actuator future development in control technology is discussed and prospected.
作者
施建昌
肖晓兰
李昊
冯发辉
陈志健
区森荣
陈可
Shi Jian-chang;Xiao Xiao-lan;Li Hao;Feng Fa-hui;Chen Zhi-jian;Ou Sen-rong;Chen Ke(School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China;National Key Laboratory of High Performance Tools,Guangdong University of Technology,Guangzhou 510006,China;Department of Electrical Engineering&Electronics,University of Liverpool,Liverpool L693GJ,The United Kingdom of Great Britain and Northern Ireland)
出处
《广东工业大学学报》
CAS
2024年第4期14-25,共12页
Journal of Guangdong University of Technology
基金
国家重点研发计划项目(2023YFE0204400)
国家重点实验室开放课题项目(JMDZ2021009)。
关键词
压电致动器
非线性特征
迟滞模型
蠕变模型
控制策略
piezoelectric actuators
nonlinear characteristics
hysteresis model
creep model
control strategies
