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用于低相干干涉测量系统的多通道数字与模拟信号同步采集方法研究

Research on Multi-channel Digital and Analog Signal Synchronous Acquisition Method for Low Coherence Interferometric Measurement Systems
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摘要 在现代工程领域中,模拟信号和数字信号同步采集的重要性变得越来越显著。同步采集这两种类型的信号可以提高数据采集和处理的准确性、可靠性,并避免数据延迟、抖动等问题,尤其对于一些特定应用场景具有极高的必要性。为了适应低相干干涉测量系统中多类型多路信号的同步采集与处理需求,基于已有的数据采集仪,设计并制作了数字信号调理板,并通过实验验证了数字信号与模拟信号的同步采集情况。实验结果表明:所设计的系统不仅可以实现两种信号的高速同步采集,而且系统整体位移采集的精度很高:电动位移台在0~70 mm行程内,系统测量值与干涉仪测量值最大误差为2.52μm;压电位移台在0~320μm内,系统测量值与干涉仪测量值最大误差仅为0.54μm。 In modern engineering,the importance of simultaneous acquisition of analog and digital signals is more and more significant.Simultaneous acquisition of both types of signals can improve the accuracy and reliability of data acquisition and processing,and avoid problems such as data delays and jitter,which are highly necessary especially for some specific application scenarios.In order to adapt to the synchronous acquisition and processing requirements of multiple types of multi-channel signals in low coherence interferometry systems,a digital signal conditioning board was designed and fabricated based on the existing data acquisition instrument,and the synchronous acquisition of digital and analog signals was verified through experiments.The experimental results indicate that the designed system can not only achieve high-speed synchronous acquisition of two types of signals,but also has high accuracy in displacement acquisition:within the range from 0 mm to 70 mm stroke of the electric displacement stage,the maximum error is 2.52μm and the maximum error for the piezoelectric displacement stage from 0μm to 320μm stroke is only 0.54μm.
作者 丁斌 何飞飞 毛敏 祖洪飞 陈骏 张翔 陈旭雯 DING Bin;HE Feifei;MAO Min;ZU Hongfei;CHEN Jun;ZHANG Xiang;CHEN Xuwen(Nantong Institute of Metrology and Measurement,Nantong Jiangsu 226007,China;School of Mechanical Engineering,Zhejiang Sci-Tech University,Hangzhou Zhejiang 310018,China;Zhejiang Premax Technology Co.,Ltd.,Ningbo Zhejiang 315048,China;Zhejiang Longyu Intelligent Technology Co.,Ltd.,Haining Zhejiang 314419,China)
出处 《机床与液压》 北大核心 2024年第15期137-142,共6页 Machine Tool & Hydraulics
基金 江苏省市场监督管理局科技计划项目(KJ21125021) 宁波市重点研发计划暨“揭榜挂帅”项目(2023Z135,2023Z131) 2021年海宁市协同创新项目(20210101)。
关键词 同步采集 模拟信号 数字信号 低相干干涉 光栅调理 simultaneous acquisition analog signal digital signal low coherence interferometry grating conditioning
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