摘要
在Fab中,作为晶圆在不同制成环节的转换载体的承载器,晶圆装载端口(LoadPort)得到了非常广泛的应用。但是大部分高性能的产品仍然处于进口依赖的状态,LoadPort关键技术的自主研发显得尤为重要。本文设计了一种基于可编程逻辑控制器(PLC)的能够满足半导体生产线需求的产品,并介绍了其核心功能、硬件组成、软件架构等内容。
In Fab,as a carrier of the conversion carrier of wafers in different manufacturing links,wafer loading port(LoadPort)has been widely used.However,most of the high-performance products are still in a state of import dependence,and the independent research and development of LoadPort’s key technologies are particularly important.This paper designs a product based on programmable logic controller(PLC)that can meet the needs of semiconductor production lines,and introduces its core functions,hardware components,software architecture and other contents.
作者
王冲
李朋
陈胜华
Wang Chong;Li Peng;Chen Sheng-hua(Ningbo ALLSEMI Co.,Ltd.,Ningbo 315400,Zhejiang Province,China)
出处
《科学与信息化》
2024年第16期34-37,共4页
Technology and Information
