摘要
为了提高声表面波(SAW)滤波器的使用寿命和设计效率,有必要研究谐振单元对滤波器功率耐受力的影响。首先通过FEM有限元软件搭建由Al电极、42°Y-X LiTaO_(3)压电材料薄膜和SiO_(2)/Poly-Si/Si衬底构成的谐振器模型,并分析IDT、声孔径、半周期对其阻抗的影响。同时,提出了一种谐振器功率测试方法,该方法可以计算出谐振器的各个频点下加载功率随输入功率的变化。为了验证功率测试方法的可靠性,对采用3030C封装的B41(2515~2675 MHz)滤波器进行功率测试,结果显示在输入功率为23 dBm时,滤波器被烧毁,与仿真数据一致。最后结合电容公式和仿真数据证实了谐振器的面积变化会改变滤波器的电容比,进而影响滤波器的散热,因此可以通过改变SAW滤波器各支路串并联结构以及各谐振器叉指对数、孔径、半周期,来提高滤波器功率耐受性。
To improve the service life and design efficiency of SAW filters,it is necessary to explore the effect of resonant units on the power tolerance of filters.Firstly,a resonator model consisting of Al electrodes,42°Y-X LiTaO_(3)piezoelectric material film,and SiO_(2)/Poly-Si/Si substrate was constructed using FEM software,and the impact of IDT,aperture size,and half-period on its impedance was analyzed.Meanwhile,a method was proposed to test resonator power,which could calculate the loaded power as a function of input power at each frequency point of the resonator.To verify the reliability of the method,the power test of the B41(2515-2675 MHz)filter in 3030C package was performed.It shows that the filter burns out at input power of 23 dBm,which is consistent with the simulation.Finally,the capacitance formula and simulation data together confirm that the area variation of the resonator will change the capacitance ratio of the filter,which in turn affects the heat dissipation of the filter.Therefore,the power tolerance of the filter can be improved by varying the series-parallel structure of each branch of the SAW filter,the number of pairs of fork fingers,aperture diameter,and half-period of each resonator.
作者
白凤
帅垚
吴传贵
罗文博
张万里
BAI Feng;SHUAI Yao;WU Chuangui;LUO Wenbo;ZHANG Wanli(School of Optoelectronic Engineering,Chongqing University of Posts and Telecommunications,Chongqing400065,China;Chongqing Institute of Microelectronics Industry Technology,UESTC,Chongqing401332,China;School of Electronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu611731,China)
出处
《电子元件与材料》
CAS
北大核心
2024年第7期860-865,共6页
Electronic Components And Materials
基金
四川省科技计划基金资助项目(2020YFJO02)。
关键词
SAW
功率
电容比
谐振器
有限元
SAW
power
capacitance ratio
resonator
finite element
