摘要
传统直叶片结构的涡轮分子泵在高转速的背景下面临着新的发展机遇与挑战,为了突破当前遇到的“涡轮分子泵的抽气速率随着涡轮转速增加到一定程度以后就不再增加,仿佛进入了一个饱和状态”的瓶颈问题,文章从分子气体动力学基本原理出发,采用蒙特卡洛方法,分析了涡轮转速提高以后给涡轮分子泵的抽气机制带来的新变化,发现了传统直叶片结构的抽气叶列和抽气模式与目前达到的高转速不匹配限制了抽速的提升,但高转速背景下又为其抽气性能的提升提供了可能。理论分析和研究发现在涡轮叶列中设置随叶片半径变化的扭转叶片是突破瓶颈的途径,论述了设置扭转叶片的根本原因,提出了高转速小角度的设计理念和新型扭转叶片的几何建模的方法,以期实现最佳叶列结构的设计与求解,为研制高转速下高性能、高适应性涡轮分子泵提供理论依据与技术支撑,也为将来涡轮分子泵的结构优化设计提供了一个方向。
Turbomolecular pumps with traditional straight blade structures face new development opportunities and challenges in the background of high rotational speeds.In order to break through the bottleneck problem of“the pumping speed stops increasing as the turbine rotational speed reaches a certain level,as if it has entered a saturation state”currently encountered,this article starts from the basic principles of molecular gas dynamics and uses Monte Carlo method to analyze the new changes brought by the increase in turbine rotational speed on the pumping mechanism of turbomolecular pumps.It was found that the traditional straight blade structure and pumping mode did not match the current high rotational speed,which limited the improvement of pumping speed.The application background of high rotational speed also provided possibilities for the improvement of its pumping performance.Theoretical analysis and research have found that setting twisted blades that vary with the blade radius in a turbine blade row is the only way to break through the bottleneck.The fundamental reason for setting twisted blades is discussed.The design concept of small angle and the geometric modeling method of new twisted blades are proposed to achieve the design and solution of the optimal blade row structure and provide theoretical basis and technical support for the development of high-performance and high adaptability turbomolecular pumps.It also provides a direction for the structural optimization design of future turbomolecular pumps.
作者
孙坤
邓海顺
胡鑫
王成
汪森辉
张世伟
SUN Kun;DENG Haishun;HU Xin;WANG Cheng;WANG Senhui;ZHANG Shiwei(School of Mechatronics Engineering,Anhui University of Science and Technology,Huainan 232001,China;School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)
出处
《真空科学与技术学报》
CAS
CSCD
北大核心
2024年第8期657-667,共11页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(52305240)
安徽高校自然科学研究项目(2023AH051173)。
关键词
涡轮分子泵
扭转叶片
高转速
抽气机制
发展趋势
Turbomolecular pump
Twisted blade
High rotational speed
Pumping mechanism
Development trends
