摘要
扫描电子显微镜用X射线能谱仪分析是元素定量分析的重要手段。对X射线能谱仪定量分析的基本工作原理进行简述,并对X射线能谱仪的定量分析方式、提高定量分析结果准确性的方法,以及定量分析中常见的问题进行了探讨,为进一步提高能谱仪定量分析的准确性提供了一定的参考。
Scanning electron microscopy and X-ray energy spectrometer analysis were important methods for quantitative analysis of elements.The basic working principle of quantitative analysis of X-ray energy spectrometer was briefly described,and discussed the quantitative analysis methods of X-ray energy spectrometer,methods to improve the accuracy of quantitative analysis results,and common problems in quantitative analysis.It provided a certain reference for further improving the accuracy of quantitative analysis of energy spectrometer.
作者
曹艳芬
曹方方
孔强强
宋鹏
辛玲
李海娥
CAO Yanfen;CAO Fangfang;KONG Qiangqiang;SONG Peng;XIN Ling;LI Haie(Jining Institute of Quality&Metrology Inspection,Jining 272000,China;Shandong Provincial Eco-environment Monitoring Center,Ji’nan 250101,China)
出处
《理化检验（物理分册）》
CAS
2024年第9期15-18,共4页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
关键词
X射线能谱仪
元素定量分析
加速电压
计数率
谱峰
X-ray energy spectrometer
quantitative analysis of element
acceleration voltage
counting rate
spectral peak
