摘要
八氟丙烷具有良好的热稳定性和化学稳定性,主要用作半导体器件制作过程中的等离子体刻蚀气和清洗气。对八氟丙烷的制备和纯化工艺进行了总结分析,八氟丙烷的制备方法有直接氟化、电解氟化、氟氯烷烃的氟化、六氟丙烯的氟化加成等,纯化方法有精馏法、吸附法、精馏+吸附法、杂质转化法和膜分离法等,对于高纯度电子级八氟丙烷的制备和纯化工艺开发有一定的指导意义。
Octafluoropropane has good thermal and chemical stability and is mainly used as plasma etching gas and cleaning gas in semiconductor device manufacturing process.The preparation and purification process of octafluoropropane were summarized and analyzed.The preparation methods of octafluoropropane are direct fluorination,electrolytic fluorination,fluorination of alkanes containing fluorine and chlorine,fluorination addition of hexafluoropropylene,etc.The purification methods include distillation,adsorption,distillation+adsorption,impurity conversion and membrane separation,etc.,which has certain guiding significance for the preparation and purification process development of high purity electronic grade octafluoropropane.
作者
李笑艳
何红振
张金彪
袁胜芳
翟晓颖
LI Xiaoyan;HE Hongzhen;ZHANG Jinbiao;YUAN Shengfang;ZHAI Xiaoying(Haohua Gas Co.,Ltd.,Luoyang 471000,China)
出处
《低温与特气》
CAS
2024年第4期6-10,共5页
Low Temperature and Specialty Gases
基金
集成电路用新型刻蚀气体电子级氟甲烷的研制(2301005A)。
关键词
八氟丙烷
制备
纯化
octafluoropropane
preparation
purification
