摘要
针对于一款放电腔直径为60 mm的射频感应耦合等离子体离子源,采用数值模拟的方法研究了射频天线和放电腔结构对氩离子密度分布的影响。结果表明,相比于均匀绕制线圈,非等匝间距的射频天线可有效提高所产生等离子体中氩离子平均密度与其径向均匀性均;氩离子密度随着放电腔高度的增大先增大后减小,在高度为38 mm时达到最大值;使用阶梯式介质窗虽然可以提高氩离子的密度,但也增加了其被溅射的风险。将模拟计算结果应用于离子源实验装置的研制,实现了0.24 mA氩离子束稳定引出。
The effects of the radio-frequency(RF)antenna and the structure of the discharge chamber with a diameter of 60 mm on the distribution of argon ions were studied by numerical simulation.The results show that the average density of argon ions and its radial uniformity of plasma are effectively improved by using an RF antenna with non-uniform turn spacing compared with those by using an antenna with a uniformly wound coil.With the increase of the height of the discharge chamber,the average argon ion density increases first and then decreases,and reaches the maximum value when the discharge chamber height is 38 mm.Although the use of a stepped dielectric window can improve the argon ion density,it also increases the risk of it being sputtered.The simulation results were applied to the development of the ion source experimental device,and a stable extraction of a 0.24 mA argon ion beam was obtained.
作者
李日正
倪国华
孙红梅
王城
LI Rizheng;NI Guohua;SUN Hongmei;WANG Cheng(Hefei Institutes of Physical Science,Chinese Academy of Sciences,Hefei 230031,China;University of Science and Technology of China,Hefei 230026,China)
出处
《真空科学与技术学报》
CAS
CSCD
北大核心
2024年第9期819-824,共6页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(12275317,12105325)
青岛市科技示范项目(23-7-8-smjj-2-nsh)。
