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Topcon太阳电池氧化工艺研究

Research on the Oxidation Process of Topcon Solar Cells
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摘要 随着P型电池效率接近极限,目前,Topcon电池是与PERC产线匹配性最高的高效电池。该型电池可以提效关键背面钝化,由磷扩调整为硼扩。在Topcon电池的优化过程中,关于硼扩+大氧氧化的调试匹配至关重要。本文主要针对大氧氧化温度、时间、氧气流量进行窗口验证,通过方阻、ECV曲线、电性数据得出大氧氧化温度对ECV曲线影响最大,氧气使用均为过量气体,对大氧氧化影响不大。在后续提效过程中,仍需结合硼扩以及印刷浆料、烧结温度进行匹配优化,达到提效目的。 As the efficiency of P-type cells is close to the limit efficiency,Topcon cells will are the high-efficiency cells with the highest compatibility with the current PERC production line.In this paper,the window verification of the temperature,time and oxygen flow rate of large oxygen oxidation is carried out,and through the square resistance,ECV curve and electrical data,it is concluded that the oxygen oxidation temperature has the greatest impact on the ECV curve,followed by time,and the oxygen is basically used as excess gas,which has little effect on the oxidation of large oxygen.In the subsequent efficiency improvement process,it is still necessary to match and optimize the boron expansion,printing paste and sintering temperature to achieve the purpose of efficiency improvement.
作者 杨广伟 何灿 闫会珍 刘苗 陈飞 YANG Guangwei;HE Can;YAN Huizhen;LIU Miao;CHEN Fei(JA Solar Co.,Ltd.,Xingtai Hebei 055550)
出处 《中国科技纵横》 2024年第14期77-80,共4页 China Science & Technology Overview
关键词 Topcon太阳电池 大氧氧化工艺 高温温度 ECV曲线 topcon solar cells oxygen oxidation process high temperatures ECV curves
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