摘要
The Fabry-Pérot interferometer,a fundamental component in optoelectronic systems,offers interesting applications such as sensors,lasers,and filters.In this work,we show a tunable Fabry-Pérot cavity consisting of tunable Sagnac loop reflectors(SLRs)and phase shifters based on electrostatic microelectromechanical(MEMS)actuator.The fabrication process of the device is compatible with the standard wafer-level silicon photonics fabrication processes.This electrostatic actuation mechanism provides well-balanced,scalable pathways for efficient tuning methodologies.The extinction ratio of the continuously tunable SLRs’reflectivity is larger than 20 dB.Full 2πphase shifting is achieved,and response times of all the components are less than 25μs.Both actuators have extremely low static power,measuring under 20 fW and the energy needed for tuning is both below 20 pJ.
基金
supported by the Agency For Defense Development Grant Funded by the Korean Government(UI210008TD).
