摘要
陶瓷静电卡盘是半导体以及光学设备中的关键器件之一,主要起到固定衬底快速加热的作用,其性能与稳定性直接影响芯片制造的质量和效率。叠片工艺是实现陶瓷静电卡盘吸附和保证温度均匀性的关键工艺。多层陶瓷基板叠片机作为一种先进的精密加工设备,以其高精度、高效率的特点,在HTCC和LTCC等行业内应用广泛,但国内尚未有适用于陶瓷静电卡盘研发的叠片机。旨在通过分析陶瓷静电卡盘陶瓷基板的特点,开展大尺寸生瓷片叠片设备的研究,探索叠片机在陶瓷静电卡盘制造中的应用。
Ceramic electrostatic chuck is one of the key components in semiconductor and optical equipment,which mainly plays a role in fixing the substrate for rapid heating.Its performance and stability directly affect the quality and efficiency of chip manufacturing.The stacking process is a key process for achieving electrostatic chuck adsorption and temperature uniformity.As an advanced precision machining equipment,multi-layer ceramic substrate laminating machine is widely used in industries such as HTCC and LTCC due to its high precision and efficiency.However,there is no laminating machine suitable for the development of electrostatic chuck in China.The aim is to analyze the characteristics of ceramic substrates in ceramic electrostatic chucks,the research of large size ceramic stacking equipment is carried out,and the application of stacking machine in the manufacture of ceramic electrostatic chuck is explored.
作者
马世杰
韦杰
张佳欢
MA Shijie;WEI Jie;ZHANG Jiahuan(The 2nd Research institute of CETC,Taiyuan 030024,China)
出处
《电子工艺技术》
2024年第6期38-41,共4页
Electronics Process Technology
关键词
陶瓷静电卡盘
叠片机
半导体
光学设备
ceramic electrostatic chuck
stacking machine
semiconductor
optical equipment
