摘要
In order to discuss the several applications of MEMS in fluid area,study the components of MEMS.And introduce the principles,types and applications based on flow sensor and pressure sensor. In the last,discuss the problems when the sensors was applied in the fluid areas.
In order to discuss the several applications of MEMS in fluid area,study the components of MEMS.And introduce the principles,types and applications based on flow sensor and pressure sensor. In the last,discuss the problems when the sensors was applied in the fluid areas.
