摘要
综述了光声技术理论在电子器件中的应用 ,包括 :测量热扩散率、表面缺陷、半导体掺杂浓度、厚度及研究表面电性质等 .
In this paper not only the application of the principles of photoacoustics in electronic component are introduced,including measure thermal diffusivity?surface defect?the mixed density of semiconductor?thickness and study the surface electric property,but also their research status and developing prospects are described in brief.\;
出处
《机械与电子》
2003年第1期54-56,共3页
Machinery & Electronics
关键词
光声技术
电子器件
光声效应
光声光谱
photoacoustic effects
photoacoustic spectroscopy
electronic component
