摘要
本文提出了一种利用EDAX PV9900能谱仪半定量分析(SUPQ)中的峰背拟合(INTE)功能来正确识别X射线能谱重叠峰的可行方法,并以Ag-SnO_2-In_2O_3合金材料为试样给出了几则应用实例和相应的实验结果。初步研究表明,该方法结合定性分析(EDAX)中的谱线识别(ID)功能可正确识别两峰能量差△E仅为20-50eV,甚至△E～10eV,谱峰强度约为两倍背底标准差的重叠峰。
The identification of overlap-peaks is one of difficult problems in EDS qualitative analyses. This article sug- gests a feasible method on identification of EDS overlap—peaks. Some examples and corresponding experimental re- sults were given by using SUPQ and INTE functions in EDAX PV9900 Energy Dispersive Spectrometer. Prelimi- nary study showed that, combine this method with ID function in EDAX, the overlap-peaks of △E=20~50ev (even △E^10ev)and peak intensity Np=2N_B^(1/2) can be identified correctly.
出处
《电子显微学报》
CAS
CSCD
1992年第1期37-42,共6页
Journal of Chinese Electron Microscopy Society
关键词
X射线能谱
峰背拟合
重叠识别
energy dispersion x—ray spectrum(EDS),fit of peaks and background,identification of (EDS)overlap-peaks.
