摘要
报道了在普通化学实验室中设计和加工玻璃微流控芯片的方法。用AdobeIllustrator 8.0软件设计微流控芯片图形 ,通过高分辨率激光照排机在照相底片上制得光刻掩模。用商品匀胶铬板表面的 14 5nmCr 5 70nmAz 180 5光胶层作为保护层 ,在 5 0℃刻蚀液 (1mol LHF +1mol LNaF)中 ,刻蚀速度为 2 μm min。通过彻底洗净加工好的玻璃基片 ,提高了芯片热键合的质量和成品率。制得的芯片已成功地用于氨基酸分离和PCR扩增。
This paper describes a procedure that makes it possible to design and fabricate microfluidic chips on glass substrates in a conventional chemical laboratory. A network of microfluidic channels was designed with a CAD program (Adobe Illustrator 8.0). This design was transferred onto a sheet of Konica film by a high-resolution laser setter. The Konica film was used as a mask for ultraviolet exposure in the photolithographic procedure. A 145 nm. Cr/570 nm Az - 1805 photoresist layer on the commercially available glass substrate was used as a sacrificial mask, which was effective for etching with 1 mol/L HF + 1 mol/L NaF at 50degreesC. The etching rate was 2 mum/min. After rigorously cleaning the etched and blank substrate,the two substrates were brought into close contact with each other in a flow of high purity water to avoid contamination from dust-particles in laboratory environment. Thus, the bonding quality was significantly improved. Using these improved fabrication techniques, high-quality microfluidic: chips. with channel-densities of 70/cm (70 mum channel width) can be routinely obtained in the conventional laboratory. The chips have been used successfully for the separation of amino acids and for polymerase chain reaction ( PCR) amplification.
出处
《分析化学》
SCIE
EI
CAS
CSCD
北大核心
2003年第1期116-119,共4页
Chinese Journal of Analytical Chemistry
基金
国家自然科学基金资助项目 (No .2 0 2 990 3 0 )
