摘要
在介绍快速成形技术以及微机电系统与微细加工技术的基础之上,对比分析了一些基于快速成形技术微细加工方法的优缺点及其最新研究成果。对于激光诱导选择性化学液相沉积快速成形技术的研究,首先从整个的系统原理到工艺流程进行详细地论述,并指出此技术所存在的一些优缺点。在普通玻璃上进行了激光诱导选择性化学液相沉积铜的试验,成功地沉积出点、线和面并实现了分层累加的沉积。在从激光诱导化学液相沉积技术的沉积原理和反应机理的分析到反应速率及沉积速率模型的建立的基础之上,进一步论证了激光诱导选择性化学沉积快速成形技术在三维微细加工方面的应用上是可行的。
The new technologies of rapid prototyping and micro electro mechanical systems (MEMS) and its microfabrication are introduced, and the advantages and disadvantages of some microfabri cations based on rapid prototyping and their new progress are contrastively analyzed. For studying the technique of laser-induced selective chemical liquid deposition based on rapid prototyping (LCLD&RP), firstly the whole system principles and craft process are discussed, and its some advantages and disadvantages are pointed out. Some experiments about laser-induced selective chemical deposition of copper on common glass from solution are accomplished, and the point, the line and the thin film of copper are deposited successfully, and the delamination deposition is also realized. According to our initial experimental results, the analyses of deposition principles and reaction principles and the foundation of the model of reaction rates and deposition rates, the feasibility of LCLD&RP's application on three dimension microfabrication is discussed and demonstrated.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2003年第1期137-142,共6页
Journal of Mechanical Engineering
