摘要
近场扫描光学显微技术与Raman光谱技术的结合能够在纳米尺度下提供化学 /结构信息 ,这对很多应用都是至关重要的 ,比如硅器件 ,纳米器件 ,量子点及生物样品单分子研究。本文报导了采用无孔径探针的近场Raman研究。我们的系统有两大特征 :1 近场Raman的增强是通过金属探针上的银镀层实现的 ,无需样品准备 ;2 系统在反射模式下工作 ,适用于任何样品。这两点对实际应用是至关重要的。我们首次在实际硅器件上用 1秒积分时间获得了 1维近场Raman映射和 2维近场Raman图象。我们首次展示了由于积分时间短 ,该技术可用于成象用途。因此 ,这是近场扫描Raman研究中的一次巨大进步。此外 ,我们系统中采用的金属探针可同时用于AFM及电学特性成象 ,比如电阻 ,电容 ,这些是器件应用中的重要参数。
The combination of near-field scanning optical microscopy and Raman spectroscopy provides chemical/structureal specific information with nanometer spatial resolution, which are critically important for a wide range of applications, including the study of Si devices, nano-devices, quantum dots, single molecules of biological samples. In this paper, we describe our near-field Raman study using apertureless probes. Our system has two important features, critical to practical applications. (1) The near-field Raman enhancement was achieved by Ag coating of the metal probes, without any preparation of the sample, and (2) the system works in the reflection mode, making near-field Raman study a reality for any samples. We have obtained the first 1-D Raman mapping and 2D ANSRM image of a real Si device with 1s exposure time. This is a very significant development in NSRM as it is the first demonstration that this technique can be used for imaging purpose because of short integration time. In addition, the metal tips used in our set-up can be utilized to make simultaneous AFM and electrical mappings such as resistance and capacitance that are critical parameters for device applications.
出处
《光散射学报》
2002年第4期245-251,共7页
The Journal of Light Scattering
关键词
拉曼光谱
近场光学
无孔径探针
Raman spectroscopy
Near-field optics
Apertureless
