摘要
本文籍助于Monte Carlo数值模拟分析法,模拟分析了高级次监控镀制窄带滤光片中的误差补偿过程,讨论了误差与成品率问题,并得出了一些有意义的结果。
In the paper, it was analyized by computer with the Monte-Carlo method that the error was compensated in deposition of narrowband filters with high order turning control. We have obtained a lot of interesting results from discussing of errors and the rate of finished products.
出处
《激光与红外》
CAS
CSCD
北大核心
1989年第5期47-54,共8页
Laser & Infrared
