摘要
提出了用高频光强调制、同源频率合成、软件鉴相的激光相位微距测量方法测量表面微观轮廓高度。介绍了激光表面微观测量系统的开放式PC结构、工作原理、测量电路设计与数字信号处理软件设计。该方法具有分辨率高、动态响应快。
In this paper, the measurement method of high frequency brightness modulation laser phase for mechanic surface microcosmic appearance is given out. The principles, open system structure, measurement circuits and software design are discussed. It is indicated that this method has high resolution ratio, rapid dynamic response and multiple expansible parameters of evaluation.
出处
《淮阴工学院学报》
CAS
2003年第1期48-50,共3页
Journal of Huaiyin Institute of Technology
关键词
高频光强调制
激光相位微距测量
数字信号处理
频率合成
high frequency brightness modulation
laser range finder
digital signal processing
frequency synthesizing
