摘要
随着光学、微电子、航天和激光技术的发展,在晶体或玻璃等无机材料上制备亚纳米级的超光滑无损伤表面已成为现代精密加工技术领域的重点研究课题。近年来,此项技术研究进展迅速,不仅改进了传统的抛光技术,还出现了浮法抛光、离子束加工和弹性发射加工等新技术。系统介绍了超光滑表面的检测、制备技术及其发展,并讨论了抛光过程中的机械化学作用机理。
Preparation of super-smooth surface on crystal or glass has become,one of the key problems in precision process with the developments in optics,microelectronics,space and laser technologies. Besides improvement of traditional polishing process, float polishing,ion beam machining,elastic emission machining and other new methods of polishing have been used for preparing super-smooth surface in the last decade. In this paper,the super-smooth surface measurement and preparation methods and their development are summarized,and the chemical mechanical and mechanism of polishing is also discussed.
出处
《材料导报》
EI
CAS
CSCD
2003年第3期41-44,共4页
Materials Reports
