摘要
综述了SOI技术的发展历程,SOI的主流技术,SOI技术发展的新动向,SOI技术的应用进展,并介绍了上海微系统与信息技术研究所和上海新傲科技有限公司的SOI研发和产业化情况。
This subject is a review of new progress of silicon on insulator (SOI)technology. The development history, the main SOI technologies, the new fabrication meth-ods and their applications are discussed. The status of R&D on SOI technology in ShanghaiInstitute of Microsystem and Information Technology and Shanghai Simgui Technology Co.Ltd are reported.
出处
《半导体技术》
CAS
CSCD
北大核心
2003年第9期39-43,共5页
Semiconductor Technology
