摘要
研究采用有机衬底掩膜技术和冷基底直流溅射在多孔微通道板输入面制备非晶态Al2O3电子透射膜的可行性,讨论在微通道板输入面形成连续电子透射膜与气体辉光放电的关系,测量带膜微通道板的电特性。结果表明,微通道板带膜后电子增益下降、体电阻增加、暗电流降低。
The amorphous Al2O3 electron transmission film has been successfully grown on the organic film coated, front surface of the porous microchannel plate (MCP) held at reduced temperatures by DC sputtering. The electric properties of the filmed MCP and influence of the gas glow discharge on the continuous electron transmission film forming at the input of porous MCP are also discussed. It is found that the volume resistance increases, the electron gain and dark current decreases for MCP with film.
出处
《真空科学与技术》
CSCD
北大核心
2003年第5期356-358,368,共4页
Vacuum Science and Technology
基金
国防科技重点基金(No.2.2.3.1)资助项目
关键词
微通道板
电子透射膜
像管
Microchannel plate,Electron transmission film,Image tube
