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β-Si3N4涂层辅助定向生长高效多晶硅的研究

β-Si3N4-assisted Growth of High Quality Multi-crystalline Silicon in Directional Solidification
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摘要 Si3N4是铸造多晶硅锭常用的脱模材料,颗粒状的α相与棒状的β相是Si3N4涂层中常见的两种生成相。石英坩埚底部铺设的Si3N4涂层严重影响着晶体品质。采用α,β两种不同主导相的Si3N4制作涂层。结果表明,β相主导的Si3N4涂层,可以提高脱模和引晶效果,降低硅锭底部红区高度。 Silicon nitride is a commonly used releasing material for casting multi-crystalline silicon ingots.The granularα-phase and the rod-shapedβ-phase are two generation phases commonly observed in silicon nitride coatings.The Si3N4 coating on the bottom of the quartz crucible can greatly affect the quality of the Si crystal.Two kinds of coating were made of silicon nitride with two different dominant phases ofα,β,respectively.The results show that theβ-phase-dominated silicon nitride coating can improve the demolding and the seeding effect,as well as reducing the red zone height at the bottom of the ingot.
作者 糜长成 蔡延焕 周兵 董慧 戚凤鸣 黄新明 Mi Changcheng;Cai Yanhuan;Zhou Bing;Dong Hui;Qi Fengming;Huang Xinming(College of Materials Science and Technology,Nanjing Technology University;Donghai Jing′ao Solar Technology Co.,Ltd.)
机构地区 南京工业大学材料科学与工程学院 东海晶澳太阳能科技有限公司
出处 《特种铸造及有色合金》 CAS 北大核心 2019年第8期823-827,共5页 Special Casting & Nonferrous Alloys
关键词 α-Si3N4 Β-SI3N4 主导相 引晶 脱模 α-Si3N4 β-Si3N4 Dominant Phase Seeding Demolding
分类号 O78 [理学—晶体学] O613.72 [理学—无机化学]
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特种铸造及有色合金
2019年 第8期

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