摘要
电磁驱动微拉伸装置是测试和评定微构件拉伸力学性能的一种较精确的仪器。通过分析该装置测量微构件材料力学性能的原理,提出采用高精度电容位移传感器,利用高输入阻抗的运算放大器电路和驱动电缆技术使传感器具有很好的线性度、准确度和较高的稳定性,使改进后的微拉伸装置对位移的分辨率达到1.195nm,大大提高了测量结果的精确性。
Electromagnetic actuating micro-drawing device is a kind of fairly precise instrument for testing and evaluating the mechanical properties of drawing of micro-components. By means of analyzing the principle for material's mechanical property of micro-components measured by this instrument, and adopting high precision capacitance displacement sensor and using high inputting impedance circuit of operational amplifier and driving cable technique to let the sensor possesses good linearity, accuracy and fairly high stability, thus made the improved micro-drawing device reaches a resolving power to 1.195 nanometer on displacement, and greatly enhanced the accuracy of the measured result.
出处
《机械设计》
CSCD
北大核心
2003年第11期23-24,27,共3页
Journal of Machine Design
基金
国家自然科学基金重点资助项目(50135040)
江苏省自然科学基金资助项目(BK2002147)
江苏大学微纳米科学技术研究中心专项科研资金资助项目
