摘要
介绍了用半导体激光器、单模光纤准直激光束作为测量基准轴线,四象限光电器件作为位置传感器,并由单片机进行数据采集、处理与测量结果显示的直线度准直仪。通过稳定性实验、重复特性实验和双频干涉仪比对实验,验证了本直线度测量系统的可行性。实验结果表明,测量系统实现的测量精度为(1.0+2×L)μm(L为准直距离,单位为m),测量范围为10m。
A simultaneous measuring twodimensions straightness collimation tester is developed in which the aligned laser beam based on semiconductor and singlemode fiber is used as the measuring datum axis, fourquadrants detector is used as the position sensor, a chip microcomputer is used for data acquisition and processing. The experiments on the measurement system's stability, repeatability and its comparison with the doublefrequency laser interferometer are carried out. The results of the experiments show that the accuracy of the system is about (1.0+2×L)μm (L is the collimation length,unit is meter). The measuring range is 10 meter.
出处
《光学技术》
CAS
CSCD
2003年第6期699-701,共3页
Optical Technique
