摘要
阐述了芯片实验室的材料、微细加工、流体驱动等制备技术的近期研究进展。系统介绍了芯片实验室的各种制备技术,这些技术包括紫外光刻、软刻蚀、LIGA技术、DEM技术、键合等。流体驱动是芯片实验室的动力,对多种新颖的流体驱动设计进行了对比,这些设计包括压力驱动、电渗驱动、电水力驱动、表面张力驱动、离心力驱动等。
Over the past years, there have been a number of advances in the fields of 'lab - on - a -chip'. It is focused on materials, microfabrication and mirofluidic manipulations of lab - on - a - chip technology. Some polymer materials are used as substrate. Kinds of new microfabrication technology are presented, including lithography, soft etching, LIGA, DEM and bonding, etc. Microfluidic mani -pulation is the source power of lab - on - a - chip, some novel designs of microfluidic manipulation are introduced, including pressure, electroosmosis, electorhydrodynamic, surface tension, centrifugal etc.
出处
《功能材料与器件学报》
CAS
CSCD
2003年第4期493-498,共6页
Journal of Functional Materials and Devices
基金
中国科学院生物科学与生物技术研究特别支持费(No.STZ-00-03)
中国科学院知识创新工程(No.KSCX-06)
